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Evolution of AlN buffer layers on Silicon and the effect on the property of the expitaxial GaN film 

Zang, Keyan; Wang, Lianshan; Chua, Soo-Jin; Thompson, Carl V. (2003-01)
The morphology evolution of high-temperature grown AlN nucleation layers on (111) silicon has been studied using atomic force microscopy (AFM). The structure and morphology of subsequently grown GaN film were characterized ...
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Structural analysis of metalorganic chemical vapor deposited AlN nucleation layers on Si (111) 

Zang, Keyan; Wang, Lianshan; Chua, Soo-Jin; Thompson, Carl V. (2004-01)
AlN nucleation layers are being investigated for growth of GaN on Si. The microstructures of high-temperature AlN nucleation layers grown by MOCVD on Si (111) substrates with trimethylaluminium pre-treatments have been ...

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AuthorChua, Soo-Jin (2)
Thompson, Carl V. (2)
Wang, Lianshan (2)Zang, Keyan (2)Subject
metal-organic chemical vapour deposition (2)
III-V Nitrides (1)III-V nitrides (1)... View MoreDate Issued2003 (1)2004 (1)Has File(s)Yes (2)

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