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Novel CMOS-Compatible Optical Platform 

Pitera, Arthur J.; Groenert, M. E.; Yang, V. K.; Lee, Minjoo L.; Leitz, Christopher W.; e.a. (2003-01)
A research synopsis is presented summarizing work with integration of Ge and III-V semiconductors and optical devices with Si. III-V GaAs/AlGaAs quantum well lasers and GaAs/AlGaAs optical circuit structures have been ...

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AuthorCheng, Zhiyuan (1)
Fitzgerald, Eugene A. (1)
Groenert, M. E. (1)
Lee, Minjoo L. (1)
Leitz, Christopher W. (1)
Pitera, Arthur J. (1)
Taraschi, G. (1)Yang, V. K. (1)Subjectchemo-mechanical planarization (1)
GaAs/AlGaAs lasers (1)
GeSi virtual substrates (1)optical circuit (1)
wafer bonding (1)
... View MoreDate Issued
2003 (1)
Has File(s)Yes (1)

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