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SiGe-On-Insulator (SGOI): Two Structures for CMOS Application 

Cheng, Zhiyuan; Jung, Jongwan; Lee, Minjoo L.; Nayfeh, Hasan; Pitera, Arthur J.; e.a. (2003-01)
Two SiGe-on-insulator (SGOI) structures for CMOS application are presented: surface-channel strained-Si on SGOI (SSOI) and dual-channel SGOI structures. Comparisons between two structures are made from both device performance ...

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Author
Antoniadis, Dimitri A. (1)
Cheng, Zhiyuan (1)
Fitzgerald, Eugene A. (1)
Hoyt, Judy L. (1)
Jung, Jongwan (1)
Lee, Minjoo L. (1)
Nayfeh, Hasan (1)
Pitera, Arthur J. (1)Subjectbonding (1)dual-channel (1)
etch-back (1)
mobility (1)
MOSFET (1)SGOI (1)
SiGe (1)
SiGe-on-Insulator (1)SOI (1)SSOI (1)... View MoreDate Issued
2003 (1)
Has File(s)Yes (1)

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