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Evolution of AlN buffer layers on Silicon and the effect on the property of the expitaxial GaN film

Zang, Keyan; Wang, Lianshan; Chua, Soo-Jin; Thompson, Carl V. (2003-01)

The morphology evolution of high-temperature grown AlN nucleation layers on (111) silicon has been studied using atomic force microscopy (AFM). The structure and morphology of subsequently grown GaN film were characterized ...