Now showing items 1-2 of 2
Processing, Structure, Properties, and Reliability of Metals for Microsystems
Research on the processing, structure, properties and reliability of metal films and metallic microdevice elements is reviewed. Recent research has demonstrated that inelastic deformation mechanisms of metallic films and ...
Atomistic Simulations of Metallic Cluster Coalescence
A new computational method is introduced to investigate the stresses developed in the island-coalescence stage of polycrystalline film formation during deposition. The method uses molecular dynamics to examine the behavior ...