Search
Now showing items 1-2 of 2
Processing, Structure, Properties, and Reliability of Metals for Microsystems
(2002-01)
Research on the processing, structure, properties and reliability of metal films and metallic microdevice elements is reviewed. Recent research has demonstrated that inelastic deformation mechanisms of metallic films and ...
Research on Polycrystalline Films for Micro- and Nano-Systems
(2003-01)
Polycrystalline films are used in a wide array of micro- and nano-scale devices, for electronic, mechanical, magnetic, photonic and chemical functions. Increasingly, the properties, performance, and reliability of films ...