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Investigation of the Fundamental Reliability Unit for Cu Dual-Damascene Metallization

Gan, C.L.; Thompson, Carl V.; Pey, Kin Leong; Choi, Wee Kiong; Wei, F.; e.a. (2002-01)

An investigation has been carried out to determine the fundamental reliability unit of copper dual-damascene metallization. Electromigration experiments have been carried out on straight via-to-via interconnects in the ...