Search
Now showing items 1-1 of 1
SiGe-On-Insulator (SGOI) Technology and MOSFET Fabrication
(2002-01)
In this work, we have developed two different fabrication processes for relaxed Si₁₋xGex-on-insulator (SGOI) substrates: (1) SGOI fabrication by etch-back approach, and (2) by "smart-cut" approach utilizing ...