Advanced Materials for Micro- and Nano-Systems (AMMNS): Recent submissions

Now showing items 43-45 of 122

    • SiGe-On-Insulator (SGOI) Technology and MOSFET Fabrication 

      Cheng, Zhiyuan; Fitzgerald, Eugene A.; Antoniadis, Dimitri A. (2002-01)
      In this work, we have developed two different fabrication processes for relaxed Si₁₋xGex-on-insulator (SGOI) substrates: (1) SGOI fabrication by etch-back approach, and (2) by "smart-cut" approach utilizing ...

    • SiGeC Near Infrared Photodetectors 

      Li, Baojun; Chua, Soo-Jin; Fitzgerald, Eugene A.; Leitz, Christopher W.; Miao, Lingyun (2002-01)
      A near infrared waveguide photodetector in Si-based ternary Si₁−x−yGexCy alloy was demonstrated for 0.85~1.06 µm wavelength fiber-optic interconnection system applications. Two sets of detectors with active absorption ...

    • Processing, Structure, Properties, and Reliability of Metals for Microsystems 

      Thompson, Carl V. (2002-01)
      Research on the processing, structure, properties and reliability of metal films and metallic microdevice elements is reviewed. Recent research has demonstrated that inelastic deformation mechanisms of metallic films and ...