Data processing in nanoscale profilometry

Abstract

New developments on the nanoscale are taking place rapidly in many fields. Instrumentation used to measure and understand the geometry and property of the small scale structure is therefore essential. One of the most promising devices to head the measurement science into the nanoscale is the scanning probe microscope. A prototype of a nanoscale profilometer based on the scanning probe microscope has been built in the Laboratory for Manufacturing and Productivity at MIT. A sample is placed on a precision flip stage and different sides of the sample are scanned under the SPM to acquire its separate surface topography. To reconstruct the original three dimensional profile, many techniques like digital filtering, edge identification, and image matching are investigated and implemented in the computer programs to post process the data, and with greater emphasis placed on the nanoscale application. The important programming issues are addressed, too. Finally, this system's error sources are discussed and analyzed.