Simplified Model and Numerical Analysis of Multi-layered Piezoelectric Diaphragm

dc.contributor.author	Yao, Lin-Quan
dc.contributor.author	Lu, Li
dc.date.accessioned	2003-11-29T19:51:27Z
dc.date.available	2003-11-29T19:51:27Z
dc.date.issued	2003-01
dc.identifier.uri	http://hdl.handle.net/1721.1/3731
dc.description.abstract	The validity of the dynamic analysis based on simplified plate model was investigated using of FE-codes ANSYS in the present paper. The simplified clamped multi-layered plate model was first verified by comparison with the exact model. The simply supported plate model was confirmed to be not a suitable model due to its large error as comparing with exact model. Influence of dimensions of laminar diaphragm on nature frequencies was studied. Deflection and voltage response driven by mechanical and electric loads were described. The optimized thickness ratio of PZT layer to SiO₂ and Si layers was given in the paper to obtain the best deflection export of actuator in design.	en
dc.description.sponsorship	Singapore-MIT Alliance (SMA)	en
dc.format.extent	255173 bytes
dc.format.mimetype	application/pdf
dc.language.iso	en_US
dc.relation.ispartofseries	Advanced Materials for Micro- and Nano-Systems (AMMNS);
dc.subject	piezoelectric diaphragm	en
dc.subject	laminated plate	en
dc.subject	nature frequency	en
dc.subject	FEM	en
dc.title	Simplified Model and Numerical Analysis of Multi-layered Piezoelectric Diaphragm	en
dc.type	Article	en