TiNi shape memory alloy thin films for microactuator application

dc.contributor.author	Fu, Yongqing
dc.contributor.author	Du, Hejun
dc.date.accessioned	2003-11-29T19:53:13Z
dc.date.available	2003-11-29T19:53:13Z
dc.date.issued	2003-01
dc.identifier.uri	http://hdl.handle.net/1721.1/3732
dc.description.abstract	TiNi films were prepared by co-sputtering TiNi target and a separate Ti target. Crystalline structure and phase transformation behaviors of TiNi films were investigated. Results showed that TiNi films had fine grain size of about 500 nm and fully martensitic structure at room temperature. X-ray photoelectron spectroscopy (XPS) results indicated that there is adherent and natural TiO₂ film, which is beneficial to its corrosion resistance and biocompatibillity. Results from differential scanning calorimeter (DSC), in-situ X-ray diffraction (XRD) and curvature measurement revealed clearly martensitic transformation upon heating and cooling. The TiNi films were further deposited on micromachined silicon cantilever and membrane structures in order to form micro-gripper or microvalve with large deformation due to shape-memory effect.	en
dc.description.sponsorship	Singapore-MIT Alliance (SMA)	en
dc.format.extent	1014681 bytes
dc.format.mimetype	application/pdf
dc.language.iso	en_US
dc.relation.ispartofseries	Advanced Materials for Micro- and Nano-Systems (AMMNS);
dc.subject	TiNi thin film	en
dc.subject	sputtering	en
dc.subject	shape memory	en
dc.subject	martensitic transformation	en
dc.title	TiNi shape memory alloy thin films for microactuator application	en
dc.type	Article	en