Characterization of Diamond-Like Film after Focused Ion Beam Processing

dc.contributor.author	Fu, Yongqi
dc.contributor.author	Ngoi, Kok Ann Bryan
dc.date.accessioned	2003-11-29T20:01:36Z
dc.date.available	2003-11-29T20:01:36Z
dc.date.issued	2003-01
dc.identifier.uri	http://hdl.handle.net/1721.1/3736
dc.description.abstract	Optical properties (transmission and refractive index) and chemical structure (XPS) of diamond-like coating (DLC) film before and after focused ion beam milling (FIBM) process, were investigated in this paper. It is shown by our FIBM experiment that influence of FIBM on Optical properties and chemical structure of the DLC film is not apparent, especially in near-infra region. The film still can be used for optical applications. As an application example, diffractive optical element (DOE) was directly fabricated on the film by use of FIBM. Measured diffraction efficiency of the DOE is 73%, which is acceptable for conventional use.	en
dc.description.sponsorship	Singapore-MIT Alliance (SMA)	en
dc.format.extent	75758 bytes
dc.format.mimetype	application/pdf
dc.language.iso	en_US
dc.relation.ispartofseries	Innovation in Manufacturing Systems and Technology (IMST);
dc.subject	DLC	en
dc.subject	FIBM	en
dc.subject	optical properties	en
dc.subject	XPS	en
dc.title	Characterization of Diamond-Like Film after Focused Ion Beam Processing	en
dc.type	Article	en