Electrochemical and photoelectrochemical micromachining of silicon in HF electroytes
Author(s)
Mlcak, Richard![Thumbnail](/bitstream/handle/1721.1/37526/32142133-MIT.pdf.jpg?sequence=4&isAllowed=y)
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Advisor
Harry L. Tuller.
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Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1994. Includes bibliographical references (p. 219-228).
Date issued
1994Department
Massachusetts Institute of Technology. Department of Materials Science and EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering