MIT Libraries homeMIT Libraries logoDSpace@MIT

MIT
View Item 
  • DSpace@MIT Home
  • Singapore-MIT Alliance (SMA)
  • Innovation in Manufacturing Systems and Technology (IMST)
  • View Item
  • DSpace@MIT Home
  • Singapore-MIT Alliance (SMA)
  • Innovation in Manufacturing Systems and Technology (IMST)
  • View Item
JavaScript is disabled for your browser. Some features of this site may not work without it.

Scheduling of Batch Processors in Semiconductor Manufacturing – A Review

Author(s)
Mathirajan, M.; Appa Iyer, Sivakumar
Thumbnail
DownloadIMST021.pdf (353.7Kb)
Metadata
Show full item record
Abstract
In this paper a review on scheduling of batch processors (SBP) in semiconductor manufacturing (SM) is presented. It classifies SBP in SM into 12 groups. The suggested classification scheme organizes the SBP in SM literature, summarizes the current research results for different problem types. The classification results are presented based on various distributions and various methodologies applied for SBP in SM are briefly highlighted. A comprehensive list of references is presented. It is hoped that, this review will provide a source for other researchers/readers interested in SBP in SM research and help simulate further interest.
Date issued
2003-01
URI
http://hdl.handle.net/1721.1/3755
Series/Report no.
Innovation in Manufacturing Systems and Technology (IMST);
Keywords
scheduling, batch processor, semiconductor manufacturing system, review, classification

Collections
  • Innovation in Manufacturing Systems and Technology (IMST)

Browse

All of DSpaceCommunities & CollectionsBy Issue DateAuthorsTitlesSubjectsThis CollectionBy Issue DateAuthorsTitlesSubjects

My Account

Login

Statistics

OA StatisticsStatistics by CountryStatistics by Department
MIT Libraries homeMIT Libraries logo

Find us on

Twitter Facebook Instagram YouTube RSS

MIT Libraries navigation

SearchHours & locationsBorrow & requestResearch supportAbout us
PrivacyPermissionsAccessibility
MIT
Massachusetts Institute of Technology
Content created by the MIT Libraries, CC BY-NC unless otherwise noted. Notify us about copyright concerns.