| dc.contributor.advisor | Duane Boning, Jeffrey A. Barks. | en_US |
| dc.contributor.author | Altman, Arthur H | en_US |
| dc.date.accessioned | 2007-06-28T12:35:04Z | |
| dc.date.available | 2007-06-28T12:35:04Z | |
| dc.date.copyright | 1995 | en_US |
| dc.date.issued | 1995 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/37766 | |
| dc.description | Thesis (M.S.)--Massachusetts Institute of Technology, Sloan School of Management, 1995, and Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995. | en_US |
| dc.description | Includes bibliographical references (p. 87-89). | en_US |
| dc.description.statementofresponsibility | by Arthur H. Altman. | en_US |
| dc.format.extent | 181 p. | en_US |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | |
| dc.subject | Sloan School of Management | en_US |
| dc.subject | Electrical Engineering and Computer Science | en_US |
| dc.title | Applying run-by-run process control to chemical-mechanical planarization and assessing insertion costs versus benefits of CMP | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | M.S. | en_US |
| dc.contributor.department | Sloan School of Management | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | |
| dc.identifier.oclc | 33213921 | en_US |
