Statistical metrology of interlevel dieletric thickness

Author(s)
Maung, Tinaung Daniel
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Advisor
Duane Boning.
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Description
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.
 
Includes bibliographical references (leaves 60-62).
 
Date issued
1995
URI
http://hdl.handle.net/1721.1/37776
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science
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