A linear ultrasonic motor for nano-technology
Author(s)
Choi, Henry O
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Advisor
Kamal-Youcef-Toumi.
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Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1996. Includes bibliographical references (p. 40-42).
Date issued
1996Department
Massachusetts Institute of Technology. Department of Mechanical EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Mechanical Engineering