MIT Libraries logoDSpace@MIT

MIT
View Item 
  • DSpace@MIT Home
  • MIT Libraries
  • MIT Theses
  • Graduate Theses
  • View Item
  • DSpace@MIT Home
  • MIT Libraries
  • MIT Theses
  • Graduate Theses
  • View Item
JavaScript is disabled for your browser. Some features of this site may not work without it.

Design and implementation of a high precision profilometer

Author(s)
Kwok, Tarzen
Thumbnail
DownloadFull printable version (6.310Mb)
Other Contributors
Massachusetts Institute of Technology. Dept. of Mechanical Engineering.
Advisor
Kamal Youcef-Toumi.
Terms of use
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582
Metadata
Show full item record
Abstract
A high precision profilometry system was developed primarily for the inspection of two-sided sample specimens. Based upon system specifications and requirements, it was found that the most suitable profilometry technique was atomic force microscopy (AFM). The major components of the profilometer were: 1) a commercial atomic force microscope, 2) customized sample positioning hardware, 3) image processing and control software, and 4) system calibration procedures. The primary focus of this thesis is on the design and implementation of the customized blade positioning hardware, consisting of two linear stages stacked to form an X-Y table and a novel 'flip' stage which allows both sides of the sample to be measured by the AFM. The flip stage uses a kinematic coupling design to achieve the necessary positioning precision and stability. A homogeneous transformation matrix (HTM) method was developed for calculating the profiling errors due to stage positioning errors. The actual performance and calibration of the profilometer system was investigated through various tests, including: 1) measurement / positioning repeatibility tests of individual components, 2) measurement accuracy tests (documented in a separate report), and 3) other tests, such as determination of measurement sensitivity, drift rates, and system natural frequency.
Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995.
 
Includes bibliographical references (p. 113-117 [i.e. p. [86]-[88]).
 
Date issued
1995
URI
http://hdl.handle.net/1721.1/38196
Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Mechanical Engineering.

Collections
  • Graduate Theses

Browse

All of DSpaceCommunities & CollectionsBy Issue DateAuthorsTitlesSubjectsThis CollectionBy Issue DateAuthorsTitlesSubjects

My Account

Login

Statistics

OA StatisticsStatistics by CountryStatistics by Department
MIT Libraries
PrivacyPermissionsAccessibilityContact us
MIT
Content created by the MIT Libraries, CC BY-NC unless otherwise noted. Notify us about copyright concerns.