Investigation on Thin Film Lithium Microbatteries
Author(s)Shi, Z.; Lü, L.; Ceder, Gerbrand
Thin film lithium microbatteries were investigated in this project in which LiCoO₂ cathodes about 200 to 500 nm were fabricated by pulsed-laser deposition (PLD) at different processing parameters such as laser energy and fluence, substrate temperature, background gas pressure, and target-substrate distance. Structure, microstructure and composition of as-deposited LiCoO₂ films were determined by XRD, SEM and XPS. Optimal deposition parameters were identified. Relaxation of open-circuit voltage of as-prepared cells and charge-discharge cycling were conducted to characterize the electrochemical properties of microbatteries made of these LiCoO₂ films.
Advanced Materials for Micro- and Nano-Systems (AMMNS);
thin film lithium microbatteries, pulsed-laser deposition