Nanocomposite Thin Films for both Mechanical and Functional Applications
Author(s)Zhang, Sam; Fu, Yongqing; Du, Hejun; Liu, Yang; Chen, Tupei
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The design methodology and realization of nanocomposite films aiming for mechanical (superhardness, toughness) and functional (optical, microelectronic) properties were discussed in this paper. Superhard TiCrCN and nc-TiN/a-SiNx films and super-tough nc-TiC/a-C(Al) films were prepared through co-sputtering method by optimal design of microstructure. The nanocrystalline silicon (nc-Si) passivated with a matrix of thermally grown silicon dioxide were prepared using implantation of Si into SiO₂ film, and showed improved photoluminescence and optical properties. Also discussed is the nano-composite design of thin film resistor with optimized temperature coefficient of resistivity.
Advanced Materials for Micro- and Nano-Systems (AMMNS);
nanocomposite, films, superhardness, toughness, photoluminescence, optical