Review of Direct Metal Bonding for Microelectronic Interconnections
Author(s)Zhang, G.G.; Wong, Chee Cheong
Microelectronic interconnections require advanced joining techniques. Direct metal bonding methods, which include thercomsonic and thermocompression bonding, offer remarkable advantages over soldering and adhesives joining. These processes are reviewed in this paper. The progress made in this area is outlined. Some work concerned with the bonding modeling is also presented. This model is based on the joint interface mechanics resulting from compression. Both bump and substrate deformation are taken into account. The improved understanding of the relationship between the deformation and bonding formation may provide more accurate joint evaluation criterion.
Advanced Materials for Micro- and Nano-Systems (AMMNS);
direct metal bonding, microelectronic interconnections, bump deformation, substrate deformation, thermosonic bonding, compression modeling, thermocompression bonding