Room temperature micromachined microbolometers for W-band (75 GHz-110 GHz) focal plane imaging array

Author(s)
Rahman, Arifur, 1970-
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Advisor
Qing Hu.
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996.
 
Includes bibliographical references (p. 80-86).
 
Date issued
1996
URI
http://hdl.handle.net/1721.1/38847
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science
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