Fabrication of distortion free x-ray masks using low stress tungsten
Author(s)
Ku, Yao-Ching
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Advisor
Henry I. Smith.
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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1992. Includes bibliographical references (leaves 113-115).
Date issued
1992Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer SciencePublisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science