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On Dual Actuation in Atomic Force Microscopes

Author(s)
El Rifai, Khalid; El Rifai, Osamah M.; Youcef-Toumi, Kamal
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Abstract
In this paper, the problem of dual actuation in the atomic force microscope (AFM) is analyzed. The use of two actuators to balance the trade-off between bandwidth, range, and precision has been recently extended to nano-positioning systems. Despite existing demands, this concept undergoes fundamental limitations towards its extension to AFMs. This is attributed to the non-conventional requirement imposed on the control signal response, as it used to create the image of the characterized surface.
Date issued
2004-01
URI
http://hdl.handle.net/1721.1/3914
Series/Report no.
Innovation in Manufacturing Systems and Technology (IMST);
Keywords
dual actuation, atomic force microscope, piezotube, piezocantilever, plant transfer functions, feedback systems

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