On Dual Actuation in Atomic Force Microscopes
Author(s)El Rifai, Khalid; El Rifai, Osamah M.; Youcef-Toumi, Kamal
In this paper, the problem of dual actuation in the atomic force microscope (AFM) is analyzed. The use of two actuators to balance the trade-off between bandwidth, range, and precision has been recently extended to nano-positioning systems. Despite existing demands, this concept undergoes fundamental limitations towards its extension to AFMs. This is attributed to the non-conventional requirement imposed on the control signal response, as it used to create the image of the characterized surface.
Innovation in Manufacturing Systems and Technology (IMST);
dual actuation, atomic force microscope, piezotube, piezocantilever, plant transfer functions, feedback systems