Design and prototype fabrication of a manipulator for semiconductor test equipment

Author(s)
Vallance, Robert Ryan
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Advisor
Alexander H. Slocum.
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1996.
Date issued
1996
URI
http://hdl.handle.net/1721.1/40216
Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Mechanical Engineering
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