Novel techniques for the run by run process control of chemical-mechanical polishing

Author(s)
Smith, Taber H. (Taber Hardesty)
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Advisor
Duane S. Boning.
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996.
 
Includes bibliographical references (p. 139-143).
 
Date issued
1996
URI
http://hdl.handle.net/1721.1/40235
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science
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