Two-dimensional simulation of radio-frequency glow discharges

Author(s)
Huppert, Gilbert Lee
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Advisor
Herbert H. Sawin and Robert A. Brown.
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Description
Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1996.
 
Includes bibliographical references (leaves 151-155).
 
Date issued
1996
URI
http://hdl.handle.net/1721.1/40574
Department
Massachusetts Institute of Technology. Department of Chemical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Chemical Engineering
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