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Submicron Structure Fabrication and Research
(Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT), 1981-01)
Submicron Structures Fabrication and Research
(Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT), 1982-01)
Submicron Structures Technology and Research
(Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT), 1987-01-01)
Submicron Structures Technology and Research
(Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT), 1985-01)
Submicron Structures Technology and Research
(Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT), 1987-01)
Submicron Structures Technology and Research
(Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT), 1986-01)
Submicron Structures Technology and Research
(Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT), 1984-01)
Submicron Structures Fabrication and Research
(Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT), 1983-01)
Microstructure Fabrication
(Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT), 1980-01)
Submicron Structures Technology and Research
(Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT), 1988-01-01)