Non-perfluorocompound chemistries for plasma etching of dielectrics

Author(s)
Tao, Benjamin A. (Benjamin Albert)
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Advisor
L. Rafael Reif.
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1996.
 
Includes bibliographical references (p. 108-111).
 
Date issued
1996
URI
http://hdl.handle.net/1721.1/40603
Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering
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