Growth and optical monitoring of organometallic vapor phase epitaxy
Author(s)
Foley, Lawrence J. (Lawrence Joseph)
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Advisor
Klavs F. Jensen.
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Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1996. Includes bibliographical references (p. 79-82).
Date issued
1996Department
Massachusetts Institute of Technology. Department of Materials Science and EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering