Temperature-dependent yield properties of passivated aluminum thin films on silicon wafers
Author(s)
Chu, Edison C. (Edison Chinghing)![Thumbnail](/bitstream/handle/1721.1/41414/36152095-MIT.pdf.jpg?sequence=5&isAllowed=y)
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Advisor
Subra Suresh.
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Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1996. Includes bibliographical references (p. 89-94).
Date issued
1996Department
Massachusetts Institute of Technology. Department of Materials Science and EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering