Inorganic x-ray mask technology for quantum-effect devices

Author(s)
Chu, William.
Thumbnail
DownloadRLE-TR-577-28270867.pdf (9.152Mb)
Metadata
Show full item record
Description
Includes bibliographical references (p. 116-123).
Date issued
1993
URI
http://hdl.handle.net/1721.1/4176
Publisher
Research Laboratory of Electronics, Massachusetts Institute of Technology
Other identifiers
no. 577
Series/Report no.
Technical report (Massachusetts Institute of Technology. Research Laboratory of Electronics) ; 577.
Collections