dc.contributor | Chu, William. | en_US |
dc.date.accessioned | 2004-03-02T18:29:03Z | |
dc.date.available | 2004-03-02T18:29:03Z | |
dc.date.issued | 1993 | en_US |
dc.identifier.other | no. 577 | en_US |
dc.identifier.uri | http://hdl.handle.net/1721.1/4176 | |
dc.description | Includes bibliographical references (p. 116-123). | en_US |
dc.description.sponsorship | Supported in part by the Joint Services Electronics Program. DAAL03-92-C-0001 Supported in part by the National Science Foundation. ECS 90-16437 Supported in part by the U.S. Air Force Office of Scientific Research, and the Defense Advanced Research Projects Agency. N00019-92-K-0021 | en_US |
dc.description.statementofresponsibility | William Chu. | en_US |
dc.format.extent | 123 p. | en_US |
dc.format.extent | 9596652 bytes | |
dc.format.mimetype | application/pdf | |
dc.language.iso | eng | en_US |
dc.publisher | Research Laboratory of Electronics, Massachusetts Institute of Technology | en_US |
dc.relation.ispartofseries | Technical report (Massachusetts Institute of Technology. Research Laboratory of Electronics) ; 577. | en_US |
dc.subject.lcc | TK7855.M41 R43 no.577 | en_US |
dc.title | Inorganic x-ray mask technology for quantum-effect devices | en_US |