Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography

Author(s)
Early, Kathleen.
Thumbnail
DownloadRLE-TR-565-24950294.pdf (11.45Mb)
Metadata
Show full item record
Description
Includes bibliographical references (p. 155-163).
Date issued
1991
URI
http://hdl.handle.net/1721.1/4187
Publisher
Research Laboratory of Electronics, Massachusetts Institute of Technology
Other identifiers
no. 565
Series/Report no.
Technical report (Massachusetts Institute of Technology. Research Laboratory of Electronics) ; 565.
Collections