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dc.contributorEarly, Kathleen.en_US
dc.date.accessioned2004-03-02T18:29:32Z
dc.date.available2004-03-02T18:29:32Z
dc.date.issued1991en_US
dc.identifier.otherno. 565en_US
dc.identifier.urihttp://hdl.handle.net/1721.1/4187
dc.descriptionIncludes bibliographical references (p. 155-163).en_US
dc.description.sponsorshipResearch supported by Joint Services Electronics Program DAAL03-89-C-0001 Research supported by National Science Foundation ECS 87-09806en_US
dc.description.statementofresponsibilityKathleen R. Early.en_US
dc.format.extent163 p.en_US
dc.format.extent12011723 bytes
dc.format.mimetypeapplication/pdf
dc.language.isoengen_US
dc.publisherResearch Laboratory of Electronics, Massachusetts Institute of Technologyen_US
dc.relation.ispartofseriesTechnical report (Massachusetts Institute of Technology. Research Laboratory of Electronics) ; 565.en_US
dc.subject.lccTK7855.M41 R43 no.565en_US
dc.titleExperimental characterization and physical modeling of resolution limits in proximity printing x-ray lithographyen_US


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