Characterization of mechanical and optical properties of x-ray mask membranes

Author(s)
Tsai, Flora S.
Thumbnail
DownloadRLE-TR-564-24101829.pdf (1.960Mb)
Metadata
Show full item record
Description
Includes bibliographical references (leaves 48-49).
Date issued
1991
URI
http://hdl.handle.net/1721.1/4188
Publisher
Research Laboratory of Electronics, Massachusetts Institute of Technology
Other identifiers
no.564
Series/Report no.
Technical report (Massachusetts Institute of Technology. Research Laboratory of Electronics) ; 564.
Collections