Ion beam enhanced grain growth in thin films

Author(s)
Atwater, Harry Albert, 1960-
Thumbnail
DownloadRLE-TR-527-17691187.pdf (8.479Mb)
Metadata
Show full item record
Description
Bibliography: p. 213-224.
Date issued
1987
URI
http://hdl.handle.net/1721.1/4216
Publisher
Massachusetts Institute of Technology, Research Laboratory of Electronics
Other identifiers
no 527
Series/Report no.
Technical report (Massachusetts Institute of Technology. Research Laboratory of Electronics) ; 527.
Collections