The geometric sensitivity analysis of electrostatic field for microelectromechanical system simulation

Author(s)
Wang, Jungfeng, 1971-
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Advisor
Jacob White.
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.
 
Includes bibliographical references (leaf 61).
 
Date issued
1997
URI
http://hdl.handle.net/1721.1/42668
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science
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