Direct printing of lead zirconate titanate thin films
Author(s)
Bathurst, Stephen, 1980-
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Alternative title
Direct printing of PZT thin films
Other Contributors
Massachusetts Institute of Technology. Dept. of Mechanical Engineering.
Advisor
Sang Gook Kim.
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Show full item recordAbstract
Thus far, use of lead zirconate titanate (PZT) in MEMS has been limited due to the lack of process compatibility with existing MEMS manufacturing techniques. Direct printing of thin films eliminates the need for photolithographic patterning and etching, as well as allows for controlled deposition over non-planar topographies which cannot be accomplished with conventional spin coating processes. This thesis reports the optimal conditions of deposition and crystallization for high dielectric quality PZT thin films via thermal ink jet printing. Included are details of the solution chemistry developed, printing conditions required for MEMS quality films, and thermal processing parameters that enable a strong piezoelectric response.
Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2008. Includes bibliographical references (leaves 42-44).
Date issued
2008Department
Massachusetts Institute of Technology. Department of Mechanical EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Mechanical Engineering.