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dc.contributor.advisorDuane S. Boning.en_US
dc.contributor.authorLi, Jiawei, M. Eng. Massachusetts Institute of Technologyen_US
dc.contributor.otherMassachusetts Institute of Technology. Dept. of Mechanical Engineering.en_US
dc.date.accessioned2008-11-07T19:07:19Z
dc.date.available2008-11-07T19:07:19Z
dc.date.copyright2007en_US
dc.date.issued2008en_US
dc.identifier.urihttp://hdl.handle.net/1721.1/43139
dc.descriptionThesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, February 2008.en_US
dc.descriptionIncludes bibliographical references (leaves 59-60).en_US
dc.description.abstractThis project is to respond to a need by Varian Semiconductor Equipment Associates, Inc. (VSEA) to help predict failure of ion implanters. Predictive maintenance would help to reduce the unscheduled downtime of ion implanters, whose throughput and uptime is highly important to customers. Statistical analysis is performed on historical data to extract metadata that can reflect the machine health, and statistical process control (SPC) is applied to detect deviations from normal or in-control behavior. Methods for failure prevention are also investigated. Challenging points in this project are the noise in raw signal data and the difference in data signals of different robots. To address these challenges, we apply signal filtering to extract cycle motions from raw data, and develop different generic as well as specific metadata extraction techniques for different robots. We test the extraction approaches and results using healthy data of ten machines, and find that the metadata on which we chose to perform SPC is suitable and can serve as a consistent indicator of a machine's health. We further develop an application using Visual Basic based on our study, and provide a user guide on how to generate the analysis reports on new data using our application.en_US
dc.description.statementofresponsibilityby Jiawei Li.en_US
dc.format.extent68 leavesen_US
dc.language.isoengen_US
dc.publisherMassachusetts Institute of Technologyen_US
dc.rightsM.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.en_US
dc.rights.urihttp://dspace.mit.edu/handle/1721.1/7582en_US
dc.subjectMechanical Engineering.en_US
dc.titleA case model for predictive maintenanceen_US
dc.typeThesisen_US
dc.description.degreeM.Eng.en_US
dc.contributor.departmentMassachusetts Institute of Technology. Dept. of Mechanical Engineering.en_US
dc.contributor.departmentMassachusetts Institute of Technology. Department of Mechanical Engineering
dc.identifier.oclc247068620en_US


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