Aligned T-gate, fabrication using X-ray lithography

Author(s)
Meinhold, Mitchell W., 1972-
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Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
Advisor
Henry I. Smith.
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.
 
Includes bibliographical references (leaves 55-56).
 
Date issued
1997
URI
http://hdl.handle.net/1721.1/43303
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science.
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