A micromechanical silicon oscillating accelerometer
Author(s)Gibbons, Kevin A. (Kevin Augustine)
Marc S. Weinberg.
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Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997.Includes bibliographical references (leaves 90-91).
DepartmentMassachusetts Institute of Technology. Dept. of Mechanical Engineering
Massachusetts Institute of Technology