Effects of high temperature treatment on curl and microstructure of heavily boron-doped silicon
Author(s)
Bruce, Denise M. (Denise Marie)![Thumbnail](/bitstream/handle/1721.1/43445/37863459-MIT.pdf.jpg?sequence=5&isAllowed=y)
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Advisor
Kaplesh Kumar.
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Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1997. Includes bibliographical references (leaves 109-110).
Date issued
1997Department
Massachusetts Institute of Technology. Department of Materials Science and EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering