Effects of high temperature treatment on curl and microstructure of heavily boron-doped silicon

Author(s)
Bruce, Denise M. (Denise Marie)
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Advisor
Kaplesh Kumar.
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1997.
 
Includes bibliographical references (leaves 109-110).
 
Date issued
1997
URI
http://hdl.handle.net/1721.1/43445
Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering
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