Variation reduction in a wafer fabrication line through inspection optimization
Author(s)Bean, John W. (John Wellard)
Tom Eagar, Roy Welsch.
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Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1997, and Thesis (M.S.)--Massachusetts Institute of Technology, Sloan School of Management, 1997.Includes bibliographical references (p. 44).
DepartmentMassachusetts Institute of Technology. Dept. of Materials Science and Engineering; Sloan School of Management
Massachusetts Institute of Technology
Materials Science and Engineering, Sloan School of Management