Variation reduction in a wafer fabrication line through inspection optimization

Author(s)
Bean, John W. (John Wellard)
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Advisor
Tom Eagar, Roy Welsch.
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1997, and Thesis (M.S.)--Massachusetts Institute of Technology, Sloan School of Management, 1997.
 
Includes bibliographical references (p. 44).
 
Date issued
1997
URI
http://hdl.handle.net/1721.1/43446
Department
Sloan School of Management; Massachusetts Institute of Technology. Department of Materials Science and Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering, Sloan School of Management
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