Atom abstraction in the interaction of F₂ and XeF₂ with Si(100)

Author(s)
Gosalvez-Blanco, David, 1968-
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Advisor
Sylvia T. Ceyer.
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemistry, 1997.
 
Includes bibliographical references.
 
Date issued
1997
URI
http://hdl.handle.net/1721.1/43505
Department
Massachusetts Institute of Technology. Department of Chemistry
Publisher
Massachusetts Institute of Technology
Keywords
Chemistry
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