Silicon microaccelerometer fabrication technologies
Author(s)
Hsu, Charles Heng-Yuan, 1967-
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Advisor
Martin A. Schmidt.
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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997. Includes bibliographical references (leaves 275-282).
Date issued
1997Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer SciencePublisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science