A high resolution capacitance-based lateral position microsensor
Author(s)
Adams, Douglas Edward
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Advisor
Kamal Youcef-Toumi.
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Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997. Includes bibliographical references (leaves 161-164).
Date issued
1997Department
Massachusetts Institute of Technology. Department of Mechanical EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Mechanical Engineering