The development and characterization of kinematic interfaces for the semiconductor industry

Author(s)
Alden, John C. (John Christopher)
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Advisor
Alexander Slocum.
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Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997.
 
Includes bibliographical references (p. 100).
 
Date issued
1997
URI
http://hdl.handle.net/1721.1/46052
Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Mechanical Engineering
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