Characterization of low k CVD deposited interlayer dielectrics for integrated circuits

Author(s)
Harker, Marnie L. (Marnie Lynn), 1974-
Thumbnail
DownloadFull printable version (5.830Mb)
Advisor
Karen K. Gleason.
Terms of use
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582
Metadata
Show full item record
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1997.
 
Includes bibliographical references (leaves 62-66).
 
Date issued
1997
URI
http://hdl.handle.net/1721.1/46100
Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering
Collections